TSMC exposed the defect density (D0) of its N2 process technology relative to its predecessors at the same stage of development at its North American Technology Symposium this week. According to the ...
Semiconductor devices based on Si (silicon) are not limited to data processing applications such as logic and memory devices for computers and communication equipment but are also widely used for ...
Semiconductors may be small, but the impacts they have are significant. Semiconductors used in life-dependent applications, such as pacemakers, defibrillators, life support systems, automotive safety ...
Optimizing CD variation and defect reduction comprehensively, to improve results of a wide defect process window with a narrow CD distribution. This study focused on the defect behavior analysis with ...